Concepedia

Development and Benchmarking of Multivariate Statistical Process Control Tools for a Semiconductor Etch Process: Improving Robustness through Model Updating

Neal B. Gallagher, Barry M. Wise, Stephanie Watts Butler, Daniel D. White, Gabriel G. Barna

IFAC Proceedings Volumes · 1997 · 84 citations · 12 references

References

12

Principal component analysis

Svante Wold, Kim H. Esbensen, Paul Geladi · Chemometrics and Intelligent Laboratory Systems · 1987 · 11.5K citations

Natural Sciences, Biostatistics, Data Analytics +5

A User's Guide to Principal Components

Stefan D. Leigh, J. Edward Jackson · Technometrics · 1993 · 3.4K citations

Computing, Data Science, Multivariate Visualization +7

Statistical process control of multivariate processes

John F. MacGregor, Theodora Kourti · Control Engineering Practice · 1995 · 1.2K citations

Engineering, Chemical Engineering, Industrial Engineering +14

Control Procedures for Residuals Associated With Principal Component Analysis

J. Edward Jackson, Govind S. Mudholkar · Technometrics · 1979 · 1.2K citations

Computing, Data Science, Quality Assurance +14

Multivariate statistical monitoring of process operating performance

J.V. Kresta, John F. MacGregor, Thomas E. Marlin · The Canadian Journal of Chemical Engineering · 1991 · 978 citations

Engineering, Chemical Engineering, Process Control +16