Barry M. Wise

The process chemometrics approach to process monitoring and fault detection

Barry M. Wise, Neal B. Gallagher · Journal of Process Control · 1996 · 842 citations

Engineering, Measurement, Process Chemometrics Approach +14

A comparison of principal component analysis, multiway principal component analysis, trilinear decomposition and parallel factor analysis for fault detection in a semiconductor etch process

Barry M. Wise, Neal B. Gallagher, Stephanie Watts Butler et al. · Journal of Chemometrics · 1999 · 290 citations

Fault Diagnosis, Engineering, Process Instrumentation +21

Pre‐whitening of data by covariance‐weighted pre‐processing

Harald Martens, Martin Høy, Barry M. Wise et al. · Journal of Chemometrics · 2003 · 105 citations

Engineering, Measurement, Covariance‐weighted Pre‐processing +21

Development and Benchmarking of Multivariate Statistical Process Control Tools for a Semiconductor Etch Process: Improving Robustness through Model Updating

Neal B. Gallagher, Barry M. Wise, Stephanie Watts Butler et al. · IFAC Proceedings Volumes · 1997 · 84 citations

Engineering, Improving Robustness, Industrial Engineering +13

Curve resolution for multivariate images with applications to TOF-SIMS and Raman

Neal B. Gallagher, Jeremy M. Shaver, Elaine Martin et al. · Chemometrics and Intelligent Laboratory Systems · 2004 · 79 citations

Geometric Modeling, High Resolution, Multivariate Images +7