Tomohiro Kubota

Oxide thickness dependence of energy shifts in the Si 2p levels for the SiO2/Si structure, and its elimination by a palladium overlayer

Hikaru Kobayashi, Tomohiro Kubota, Hidefumi Kawa et al. · Applied Physics Letters · 1998 · 59 citations · Full text

Engineering, Oxide Thickness Dependence, Silicon On Insulator +20

Studies on interface states at ultrathin SiO2/Si(100) interfaces by means of x-ray photoelectron spectroscopy under biases and their passivation by cyanide treatment

Hikaru Kobayashi, Akira Asano, Shinya Asada et al. · Journal of Applied Physics · 1998 · 57 citations

Materials Science, Semiconductors, Oxide Heterostructures +15

A 7-nm nanocolumn structure fabricated by using a ferritin iron-core mask and low-energy Cl neutral beams

Tomohiro Kubota, Tomohiro Baba, Seiji Samukawa et al. · Applied Physics Letters · 2004 · 48 citations

Engineering, Silicon On Insulator, 7-Nm Nanocolumn Structure +17

Enhancement of the anomalous Nernst effect in Ni/Pt superlattices

Takeshi Seki, Yuya Sakuraba, Keisuke Masuda et al. · Physical review. B./Physical review. B · 2021 · 41 citations · Full text

Fabrication of FinFETs by Damage-Free Neutral-Beam Etching Technology

Kazuhiko Endo, Shuichi Noda, Meishoku Masahara et al. · IEEE Transactions on Electron Devices · 2006 · 40 citations

Electrical Engineering, Nb Technology, Engineering +12