Statistics
Publications
4
Citations
609
H-Index
4
Active since
1995
Affiliations
S. Zolgharnain is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, microfabrication, and electron beam lithography.
Publications per year
1995–1996
4
4
Electron-beam microcolumns for lithography and related applications
T. H. P. Chang, M. G. R. Thomson, E. Kratschmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 122 citations
Engineering, Manufacturing Engineering, Materials Science +11
Experimental evaluation of a 20×20 mm footprint microcolumn
E. Kratschmer, H. S. Kim, M. G. R. Thomson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 62 citations
Engineering, Electrical Engineering, Electronic Materials +14
Electron beam technology—SEM to microcolumn
T. H. P. Chang, M. G. R. Thomson, Mingzhu Yu et al. · Microelectronic Engineering · 1996 · 45 citations · Full text
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