Statistics
Publications
6
Citations
116
H-Index
6
Active since
1987
Affiliations
Hitachi (Japan)(Current)
Akemi Moniwa is an author at Hitachi (Japan) specializing in electrical engineering, device simulation, and optimization.
Publications per year
1987–1995
6
6
Three-dimensional electron-beam resist profile simulator
Akemi Moniwa, Hidenori Yamaguchi, Shinji Okazaki · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 10 citations
Engineering, Electrical Engineering, Computational Electromagnetics +15
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