Concepedia

J H Kim

JH

5

Publications

120

Citations

5

H-Index

2016

Active since

Affiliations

Korea Research Institute of Standards and Science(Current)

Chungnam National University

Korea Institute of Machinery & Materials

J H Kim is an author at Korea Research Institute of Standards and Science specializing in instrumentation, engineering, and electrical engineering.

Top concepts

EngineeringInstrumentationPhysicsPlasma PhysicsApplied PhysicsPlasma DiagnosticsElectrical EngineeringSpectroscopyPlasma ScienceElectron Density

Publications per year

2016–2019

5

Publications

5

Flat cutoff probe for real-time electron density measurement in industrial plasma processing

H. J. Yeom, J H Kim, Dae Hee Choi et al. · Plasma Sources Science and Technology · 2019 · 41 citations · Full text

Engineering, Measurement, Flat Cutoff Probe +22

Computational comparative study of microwave probes for plasma density measurement

Dong Wook Kim, S. J. You, J H Kim et al. · Plasma Sources Science and Technology · 2016 · 25 citations

Engineering, Measurement, Sheath Width +18

Planar cutoff probe for measuring the electron density of low-pressure plasmas

Daewoong Kim, S. J. You, Sijun Kim et al. · Plasma Sources Science and Technology · 2018 · 21 citations

Engineering, Plasma Science, Plasma Physics +16

A transmission line model of the cutoff probe

Sijun Kim, Jangjae Lee, Daewoong Kim et al. · Plasma Sources Science and Technology · 2019 · 19 citations

Electron Density, Electrical Engineering, Engineering +12

Plasma density measurement and downstream etching of silicon and silicon oxide in Ar/NF<sub>3</sub> mixture remote plasma source

H. J. Yeom, Dae Hee Choi, Y S Lee et al. · Plasma Science and Technology · 2019 · 14 citations

Engineering, Plasma Physics, Downstream Etching +19

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