Concepedia

H. J. Yeom

HJ

Statistics

Publications

13

Citations

316

H-Index

11

Active since

2019

Affiliations

Korea Research Institute of Standards and Science(Current)

Chungnam National University

Korea Aerospace University

Korea Institute of Fusion Energy

Hanyang University

H. J. Yeom is an author at Korea Research Institute of Standards and Science specializing in physics, natural sciences, and plasma physics.

Publications per year

2019–2024

13

Publications

13

Discharge physics and atomic layer etching in Ar/C4F6 inductively coupled plasmas with a radio frequency bias

Min Young Yoon, H. J. Yeom, Jung‐Hyung Kim et al. · Physics of Plasmas · 2021 · 60 citations · Full text

, , +17

Plasma etching of the trench pattern with high aspect ratio mask under ion tilting

Min Young Yoon, H. J. Yeom, Jung‐Hyung Kim et al. · Applied Surface Science · 2022 · 51 citations · Full text

, , +15

Flat cutoff probe for real-time electron density measurement in industrial plasma processing

H. J. Yeom, J H Kim, Dae Hee Choi et al. · Plasma Sources Science and Technology · 2019 · 44 citations · Full text

, , +16

Generation of carbon nanowhiskers, nanotips, and nanodots by controlling plasma environment: Ion energy and radical effects

Daehan Choi, H. J. Yeom, Ki-Pyo You et al. · Carbon · 2020 · 25 citations

, , +14

Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges

Ki-Pyo You, Julian Schulze, Aranka Derzsi et al. · Physics of Plasmas · 2019 · 22 citations

, , +16

1–5 of 13