Min Young Yoon

Discharge physics and atomic layer etching in Ar/C4F6 inductively coupled plasmas with a radio frequency bias

Min Young Yoon, H. J. Yeom, Jung‐Hyung Kim et al. · Physics of Plasmas · 2021 · 57 citations · Full text

Electrical Engineering, Chemical Engineering, Engineering +14

Plasma etching of the trench pattern with high aspect ratio mask under ion tilting

Min Young Yoon, H. J. Yeom, Jung‐Hyung Kim et al. · Applied Surface Science · 2022 · 46 citations · Full text

Electrical Engineering, Ion Implantation, Engineering +11

Flat cutoff probe for real-time electron density measurement in industrial plasma processing

H. J. Yeom, J H Kim, Dae Hee Choi et al. · Plasma Sources Science and Technology · 2019 · 41 citations · Full text

Engineering, Measurement, Flat Cutoff Probe +22

Plasma low-energy ion flux induced vertical graphene synthesis

Min Young Yoon, Jong‐Ryul Jeong, Hyo‐Chang Lee et al. · Applied Surface Science · 2023 · 15 citations

Real-time monitoring of the plasma density distribution in low-pressure plasmas using a flat-cutoff array sensor

H. J. Yeom, Min Young Yoon, Gwang-Seok Chae et al. · Applied Physics Letters · 2023 · 12 citations · Full text