Concepedia

Y S Lee

YS

1

Publications

14

Citations

1

H-Index

2019

Active since

Affiliations

Chungnam National University(Current)

Y S Lee is an author at Chungnam National University specializing in plasma diagnostics, plasma simulation, and instrumentation.

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Publications per year

2019–2019

1

Publications

1

Plasma density measurement and downstream etching of silicon and silicon oxide in Ar/NF<sub>3</sub> mixture remote plasma source

H. J. Yeom, Dae Hee Choi, Y S Lee et al. · Plasma Science and Technology · 2019 · 14 citations

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