R.W. Murto

High-k gate stacks for planar, scaled CMOS integrated circuits

Howard R. Huff, C. Lim, Y. Kim et al. · Microelectronic Engineering · 2003 · 63 citations

Engineering, Computer Engineering, Electrical Engineering +12

Experimental observations of the thermal stability of high-k gate dielectric materials on silicon

Patrick Lysaght, P.J. Chen, Renate Bergmann et al. · Journal of Non-Crystalline Solids · 2002 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +16

Conventional n-channel MOSFET devices using single layer HfO/sub 2/ and ZrO/sub 2/ as high-k gate dielectrics with polysilicon gate electrode

Yudong Kim, G. Gebara, M. B. Freiler et al. · 2002 · 61 citations

Engineering, Electrical Engineering, Materials Engineering +17

Intrinsic characteristics of high-k devices and implications of fast transient charging effects (FTCE)

B.H. Lee, Chadwin D. Young, Rino Choi et al. · 2005 · 55 citations

Engineering, Electrical Engineering, Materials Science +14

Ultra-Short Pulse Current–Voltage Characterization of the Intrinsic Characteristics of High-κ Devices

Chadwin D. Young, Yuegang Zhao, Michael Pendley et al. · Japanese Journal of Applied Physics · 2005 · 53 citations

Engineering, Electrical Engineering, Physics +13