Concepedia

Hideo Kashima

HK

Statistics

Publications

4

Citations

62

H-Index

4

Active since

1991

Affiliations

Hitachi (Japan)(Current)

Hideo Kashima is an author at Hitachi (Japan) specializing in engineering, applied physics, and optoelectronics.

Top concepts

EngineeringPhysicsApplied PhysicsNanoelectronicsOptoelectronicsMaterial ScienceMechatronicsSoft RoboticsSemiconductorsInstrumentation

Publications per year

1991–2015

4

Publications

4

Anisotropic etching of GaAs using a hot Cl2 molecular beam

Tetsuo Ono, Hideo Kashima, Susumu Hiraoka et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 19 citations

Semiconductors, Materials Science, Optical Materials +15

Automated Trace-Explosives Detection for Passenger and Baggage Screening

Yasuaki Takada, H. Nagano, Yohei Kawaguchi et al. · IEEE Sensors Journal · 2015 · 18 citations

Air Sampling, Engineering, Aerospace Engineering +15

Optimization of interfaces in InGaAs/InP heterostructures grown by gas source molecular-beam epitaxy

T. Mozume, Hideo Kashima, Kazuhiko Hosomi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 13 citations

Materials Science, Epitaxial Growth, Engineering +14

Wafer-transfer robot for use in ultrahigh vacuum

Masafumi Kanetomo, Hideo Kashima, T. Suzuki · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 12 citations

Wafer Scale Processing, Engineering, Soft Robotics +11

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