Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 13 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsInterface EngineeringQuantum WellsSemiconductor HeterostructuresSemiconductor InterfacesSemiconductor SurfacesTransmission Electron MicroscopyHeteroepitaxyHeterojunction InterfacesHeterostructuresHigh-resolution Transmission Electron MicroscopyMolecular Beam EpitaxyPhotoluminescencePhotoluminescence SpectroscopySemiconductor Heterojunctions
A novel source switching procedure in gas source molecular-beam epitaxy achieves abrupt interfaces in lattice-matched InGaAs/InP. In this procedure, the source supply is interrupted at each interface to reduce excess residual As or P atoms on the InGaAs or InP surfaces. The interruption time is optimized by characterizing the heterointerfaces by Auger electron microscopy and photoluminescence spectroscopy. High-resolution transmission electron microscopy reveals that each heterointerface of single quantum wells grown by this optimized switching procedure has no transition region. To our knowledge, this is the first successful growth of a perfectly abrupt InGaAs/InP heterointerface.