Concepedia

Masafumi Kanetomo

MK

Statistics

Publications

3

Citations

58

H-Index

3

Active since

1994

Affiliations

Hitachi (Japan)(Current)

Masafumi Kanetomo is an author at Hitachi (Japan) specializing in engineering, microfabrication, and mechanical design.

Top concepts

Publications per year

1994–2014

3

Publications

3

Development of the automated circulating tumor cell recovery system with microcavity array

Ryo Negishi, Masahito Hosokawa, Seita Nakamura et al. · Biosensors and Bioelectronics · 2014 · 24 citations

, , +7

Ultrashallow <i>p</i>-type layer formation by rapid vapor-phase doping using a lamp annealing apparatus

Yukihiro Kiyota, Masaru Matsushima, Yutaka Kaneko et al. · Applied Physics Letters · 1994 · 22 citations

, , +14

Wafer-transfer robot for use in ultrahigh vacuum

Masafumi Kanetomo, Hideo Kashima, T. Suzuki · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 12 citations

, , +11

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