Concepedia

P. Bodart

PB

Statistics

Publications

8

Citations

171

H-Index

8

Active since

1995

Affiliations

Centre National de la Recherche Scientifique(Current)

Laboratoire des Technologies de la Microélectronique

Applied Materials (United States)

CEA Grenoble

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

P. Bodart is an author at Centre National de la Recherche Scientifique specializing in natural sciences, chemistry, and physics.

Publications per year

1995–2014

8

Publications

8

Analysis of pulsed high-density HBr and Cl2 plasmas: Impact of the pulsing parameters on the radical densities

P. Bodart, M. Brihoum, G. Cunge et al. · Journal of Applied Physics · 2011 · 44 citations

, , +12

Atomic-scale silicon etching control using pulsed Cl2 plasma

Camille Petit-Étienne, Maxime Darnon, P. Bodart et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2012 · 24 citations

, , +16

Pulsed Cl<sub>2</sub>/Ar inductively coupled plasma processing: 0D model versus experiments

E. Despiau-Pujo, M. Brihoum, P. Bodart et al. · Journal of Physics D Applied Physics · 2014 · 23 citations

, , +17

Measurement of free radical kinetics in pulsed plasmas by UV and VUV absorption spectroscopy and by modulated beam mass spectrometry

G. Cunge, P. Bodart, M. Brihoum et al. · Plasma Sources Science and Technology · 2012 · 18 citations · Full text

, , +15

Synchronous Pulsed Plasma for Silicon Etch Applications

Maxime Darnon, Camille Petit-Étienne, Erwine Pargon et al. · ECS Transactions · 2010 · 18 citations

, , +17

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