Concepedia

W.G. En

WE

Statistics

Publications

10

Citations

200

H-Index

10

Active since

1992

Affiliations

University of California, Berkeley(Current)

Materials Processing (United States)

Advanced Micro Devices (United States)

W.G. En is an author at University of California, Berkeley specializing in plasma physics, physics, and plasma immersion ion implantation.

Publications per year

1992–2004

10

Publications

10

Analytical modeling of plasma immersion ion implantation target current using the SPICE circuit simulator

W.G. En, N.W. Cheung · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 38 citations

, , +14

Comparison of experimental target currents with analytical model results for plasma immersion ion implantation

W.G. En, M. A. Lieberman, N.W. Cheung · IEEE Transactions on Plasma Science · 1995 · 37 citations

, , +16

Modeling of oxide charging effects in plasma processing

W.G. En, B.P. Linder, N.W. Cheung · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 25 citations

, , +15

Anomalous behavior of shallow BF3 plasma immersion ion implantation

E.C. Jones, W.G. En, Shinichi Ogawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 21 citations

, , +17

A new method for determining the secondary electron yield dependence on ion energy for plasma exposed surfaces

W.G. En, N.W. Cheung · IEEE Transactions on Plasma Science · 1996 · 17 citations

, , +16

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