Concepedia

J. T. C. Yeh

JT

Statistics

Publications

6

Citations

582

H-Index

6

Active since

1983

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

J. T. C. Yeh is an author at IBM Research - Thomas J. Watson Research Center specializing in natural sciences, materials science, and materials engineering.

Publications per year

1983–2009

6

Publications

6

Laser ablation of polymers

J. T. C. Yeh · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 176 citations

, , +17

Emission spectra and etching of polymers and graphite irradiated by excimer lasers

G. Koren, J. T. C. Yeh · Journal of Applied Physics · 1984 · 145 citations

, , +17

Emission spectra, surface quality, and mechanism of excimer laser etching of polyimide films

G. Koren, J. T. C. Yeh · Applied Physics Letters · 1984 · 100 citations · Full text

, , +17

Copper deposition by electron cyclotron resonance plasma

W. M. Holber, J. S. Logan, H. J. Grabarz et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 84 citations

, , +16

Thermal and Electrical Properties of PVD Ru(P) Film as Cu Diffusion Barrier

Dung-Ching Perng, Kuo-Chung Hsu, Shuo‐Wen Tsai et al. · Microelectronic Engineering · 2009 · 41 citations

, , +16

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