Concepedia

Tom Tanaka

TT

Statistics

Publications

3

Citations

118

H-Index

3

Active since

1999

Affiliations

Applied Materials (United States)(Current)

Tom Tanaka is an author at Applied Materials (United States) specializing in plasma physics, physics, and natural sciences.

Publications per year

1999–2011

3

Publications

3

Remote microwave plasma source for cleaning chemical vapor deposition chambers: Technology for reducing global warming gas emissions

S. Raoux, Tom Tanaka, Mohan Krishan Bhan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 88 citations

Engineering, Chemical Engineering, Manufacturing Engineering +14

Production of Fluorine-Containing Molecular Species in Plasma-Generated Atomic F Flows

Guido J. Stueber, Steven A Clarke, E. R. Bernstein et al. · The Journal of Physical Chemistry A · 2003 · 17 citations

Natural Sciences, Chemistry, Physics +12

Effect of Segmenting Powered Electrode on Plasma Uniformity in Large-Area Capacitively Coupled Plasma Discharge

Zhigang Chen, Jason Kenney, Shahid Rauf et al. · IEEE Transactions on Plasma Science · 2011 · 13 citations

Natural Sciences, Electrical Engineering, Physics +17

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