Concepedia

S. Raoux

SR

11

Publications

422

Citations

11

H-Index

1992

Active since

Affiliations

University of California, Berkeley(Current)

Université de Bordeaux

Applied Materials (United States)

Lawrence Berkeley National Laboratory

S. Raoux is an author at University of California, Berkeley specializing in engineering, materials science, and applied physics.

Top concepts

Publications per year

1992–2023

11

Publications

11

A Hybrid Life Cycle Inventory of Nano-Scale Semiconductor Manufacturing

Nikhil Krishnan, Sarah Boyd, Ajay Somani et al. · Environmental Science & Technology · 2008 · 147 citations

, , +20

Remote microwave plasma source for cleaning chemical vapor deposition chambers: Technology for reducing global warming gas emissions

S. Raoux, Tom Tanaka, Mohan Krishan Bhan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 85 citations

, , +9

Formation of metal oxides by cathodic arc deposition

S. Anders, André Anders, M. Rubin et al. · Surface and Coatings Technology · 1995 · 49 citations

, , +6

Plasma distribution of cathodic arc deposition systems

S. Anders, S. Raoux, Kannan M. Krishnan et al. · Journal of Applied Physics · 1996 · 30 citations · Full text

, , +10

Growth, trapping and abatement of dielectric particles in PECVD systems

S. Raoux, David L. Cheung, M. A. Fodor et al. · Plasma Sources Science and Technology · 1997 · 22 citations

, , +11

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