Q.X. Zhang

Advanced fiber optical switches using deep RIE (DRIE) fabrication

J. Li, Q.X. Zhang, A. Q. Liu · Sensors and Actuators A Physical · 2002 · 101 citations

Photonics, Optical Materials, Engineering +5

Tolerance analysis for comb-drive actuator using DRIE fabrication

J. Li, A. Q. Liu, Q.X. Zhang · Sensors and Actuators A Physical · 2005 · 48 citations

Drie Fabrication, Engineering, Soft Robotics +8

An optical crossconnect (OXC) using drawbridge micromirrors

A. Q. Liu, Xuming Zhang, Q.X. Zhang et al. · Sensors and Actuators A Physical · 2002 · 39 citations

Photonics, Optical Materials, Engineering +8

Application of piezoresistive stress sensors in ultra thin device handling and characterization

Xiaowu Zhang, Aditya Kumar, Q.X. Zhang et al. · Sensors and Actuators A Physical · 2009 · 34 citations

Materials Science, Engineering, Soft Robotics +10

Bendability of single-crystal Si MOSFETs investigated on flexible substrate

H.Y. Li, W.Y. Loh, L. K. Bera et al. · IEEE Electron Device Letters · 2006 · 23 citations

Engineering, Mechanical Engineering, Silicon On Insulator +16