5
Publications
67
Citations
5
H-Index
2017
Active since
Affiliations
Carmen Popescu is an author at University of Birmingham specializing in microelectronics, electrical engineering, and materials science.
Top concepts
EngineeringApplied PhysicsInstrumentationOptoelectronicsMaterial ScienceMicroelectronicsMicrofabricationElectrical EngineeringChemistryNanophotonics
Publications per year
2017–2019
5
5
Sensitivity enhancement of the high-resolution xMT multi-trigger resist for EUV lithography
Carmen Popescu, Andreas Frommhold, Alexandra McClelland et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 17 citations · Full text
Short Wavelength Optic, Engineering, Electron-beam Lithography +21
High-resolution EUV lithography using a multi-trigger resist
Alex P. G. Robinson, Carmen Popescu, Dimitrios Kazazis et al. · 2018 · 13 citations · Full text
Multi-trigger resist: novel synthesis improvements for high resolution EUV lithography
Greg O’Callaghan, Carmen Popescu, Alex McClelland et al. · 2019 · 12 citations · Full text
Multi-trigger resist patterning with ASML NXE3300 EUV scanner
Alex P. G. Robinson, Yannick Vesters, Alexandra McClelland et al. · 2018 · 11 citations
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