Andreas Frommhold

Dynamic absorption coefficients of chemically amplified resists and nonchemically amplified resists at extreme ultraviolet

Roberto Fallica, Jason K. Stowers, Andrew Grenville et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 78 citations · Full text

Short Wavelength Optic, Optical Materials, Engineering +19

Dynamic absorption coefficients of CAR and non-CAR resists at EUV

Roberto Fallica, Jason K. Stowers, Andrew Grenville et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 30 citations · Full text

Electrical Engineering, Engineering, Resistor +14

Chemically amplified phenolic fullerene electron beam resist

Dongxu Yang, Andreas Frommhold, Xuan Xue et al. · Journal of Materials Chemistry C · 2013 · 27 citations · Full text

Engineering, Electron-beam Lithography, Organic Electronics +20

Fullerene-based spin-on-carbon hardmask

Andreas Frommhold, Jedsada Manyam, Richard E. Palmer et al. · Microelectronic Engineering · 2012 · 20 citations · Full text

Optimization and stability of CD variability in pitch 40 nm contact holes on NXE:3300

Lieve Van Look, Joost Bekaert, Andreas Frommhold et al. · 2018 · 18 citations

Engineering, Electron-beam Lithography, Microscopy +19