Steven A. Vitale

Liquid Droplet Dispersions Formed by Homogeneous Liquid−Liquid Nucleation:  “The Ouzo Effect”

Steven A. Vitale, Joseph Katz · Langmuir · 2003 · 458 citations

Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform

Jiadi Zhu, Ji Hoon Park, Steven A. Vitale et al. · Nature Nanotechnology · 2023 · 228 citations · Full text

Materials Science, Materials Engineering, Electrical Engineering +13

Ultra-compact nonvolatile phase shifter based on electrically reprogrammable transparent phase change materials

Qingyang Du, Yifei Zhang, Cosmin‐Constantin Popescu et al. · PhotoniX · 2022 · 214 citations · Full text

Phase Transitions, Optical Materials, Engineering +21

Silicon etching yields in F2, Cl2, Br2, and HBr high density plasmas

Steven A. Vitale, Heeyeop Chae, Herbert H. Sawin · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 125 citations

Materials Engineering, Engineering, Cl2 Plasmas +11

Work-Function-Tuned TiN Metal Gate FDSOI Transistors for Subthreshold Operation

Steven A. Vitale, J. Kedzierski, Paul Healey et al. · IEEE Transactions on Electron Devices · 2010 · 125 citations

Materials Science, Semiconductors, Electrical Engineering +15