Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform - Concepedia

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Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform

DOI Full Paper Access

228

Citations

36

References

2023

Year

Jiadi Zhu, Ji Hoon Park, Steven A. Vitale, Wenjun Ge, Gang Seob Jung, Jiangtao Wang, Mohamed Mokhtar Mohamed, Tianyi Zhang, Maitreyi Ashok, Mantian Xue,

Nature Nanotechnology

Materials ScienceMaterials EngineeringElectrical EngineeringMm PlatformEngineeringAdvanced Packaging (Semiconductors)NanoelectronicsSurface ScienceApplied PhysicsMonolayer Molybdenum DisulfideSemiconductor Device FabricationElectronic PackagingLayered MaterialMicroelectronicsSilicon On InsulatorLow-thermal-budget Synthesis

References

	Year	Citations

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