Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform

Jiadi Zhu, Ji Hoon Park, Steven A. Vitale, Wenjun Ge, Gang Seob Jung, Jiangtao Wang, Mohamed Mokhtar Mohamed, Tianyi Zhang, Maitreyi Ashok, Mantian Xue,

Nature Nanotechnology · 2023 · 251 citations · 36 references

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