Romy Liske

Statistics

Publications

Citations

220

H-Index

Active since

2005

Affiliations

Fraunhofer Institute for Photonic Microsystems(Current)

Helmholtz-Zentrum Dresden-Rossendorf

Technische Universität Dresden

Fraunhofer USA

GlobalFoundries (Germany)

Romy Liske is an author at Fraunhofer Institute for Photonic Microsystems specializing in materials science, materials engineering, and natural sciences.

Publications per year

2005–2018

Publications

Cobalt advanced barrier metallization: A resistivity composition analysis

Marcus Wislicenus, Romy Liske, Lukas Gerlich et al. · Microelectronic Engineering · 2014 · 53 citations

Natural Sciences, Materials Engineering, Materials Science +12

Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films

Syed Musab Ahmed, Romy Liske, Thomas Wunderer et al. · Diamond and Related Materials · 2005 · 39 citations

Natural Sciences, Materials Engineering, Materials Science +13

A method for characterizing the pad surface texture and modeling its impact on the planarization in CMP

Boris Vasilev, Sascha Bott, Roland Rzehak et al. · Microelectronic Engineering · 2012 · 34 citations

Engineering, Materials Engineering, Materials Science +11

Electrical Evaluation of Ru–W(-N), Ru–Ta(-N) and Ru–Mn films as Cu diffusion barriers

H. Wojcik, R. Kaltofen, U. Merkel et al. · Microelectronic Engineering · 2011 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +15

Scaling behavior of microwave reactors and discharge size for diamond deposition

T.A. Grotjohn, Romy Liske, K. Hassouni et al. · Diamond and Related Materials · 2005 · 27 citations

Engineering, Materials Engineering, Materials Science +7

1–5 of 7