Julien Gatineau

Atomic Layer Deposition of SrTiO₃ Thin Films with Highly Enhanced Growth Rate for Ultrahigh Density Capacitors

Sang Woon Lee, Jeong Hwan Han, Sora Han et al. · Chemistry of Materials · 2011 · 136 citations

Natural Sciences, Materials Engineering, Materials Science +17

Improvement in the leakage current characteristic of metal-insulator-metal capacitor by adopting RuO2 film as bottom electrode

Jeong Hwan Han, Sora Han, Woongkyu Lee et al. · Applied Physics Letters · 2011 · 80 citations

Natural Sciences, Materials Engineering, Materials Science +17

Chemical Vapor Deposition of Ru Thin Films with an Enhanced Morphology, Thermal Stability, and Electrical Properties Using a RuO₄ Precursor

Jeong Hwan Han, Sang Woon Lee, Gyu‐Jin Choi et al. · Chemistry of Materials · 2008 · 66 citations

Natural Sciences, Materials Engineering, Materials Science +17

Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor

Jae‐Min Kim, Han‐Bo‐Ram Lee, Clement Lansalot et al. · Japanese Journal of Applied Physics · 2010 · 60 citations

Natural Sciences, Materials Engineering, Materials Science +15

Atomic Layer Deposition of Ruthenium Using the Novel Precursor bis(2,6,6-trimethyl-cyclohexadienyl)ruthenium

Keith Gregorczyk, Laurent Henn‐Lecordier, Julien Gatineau et al. · Chemistry of Materials · 2011 · 56 citations

Natural Sciences, Materials Engineering, Materials Science +16