Concepedia

Laurent Henn‐Lecordier

LH

13

Publications

683

Citations

12

H-Index

2002

Active since

Affiliations

University of Maryland, College Park(Current)

Laurent Henn‐Lecordier is an author at University of Maryland, College Park specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceChemical EngineeringChemistryProcess ControlMass SpectrometryMaterials EngineeringElectrical Engineering

Publications per year

2002–2011

13

Publications

13

Nanotubular metal–insulator–metal capacitor arrays for energy storage

Parag Banerjee, Israel Pérez, Laurent Henn‐Lecordier et al. · Nature Nanotechnology · 2009 · 375 citations

Materials Science, Electrical Engineering, Engineering +4

TEM‐Based Metrology for HfO<sub>2</sub> Layers and Nanotubes Formed in Anodic Aluminum Oxide Nanopore Structures

Israel Pérez, Erin Robertson, Parag Banerjee et al. · Small · 2008 · 71 citations

Engineering, Electron Microscopy, Nanoelectronics +16

Atomic Layer Deposition of Ruthenium Using the Novel Precursor bis(2,6,6-trimethyl-cyclohexadienyl)ruthenium

Keith Gregorczyk, Laurent Henn‐Lecordier, Julien Gatineau et al. · Chemistry of Materials · 2011 · 54 citations

Materials Science, Inorganic Chemistry, Chemical Engineering +12

Role of surface intermediates in enhanced, uniform growth rates of TiO2 atomic layer deposition thin films using titanium tetraisopropoxide and ozone

Erin R. Cleveland, Laurent Henn‐Lecordier, Gary W. Rubloff · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 25 citations

Engineering, Surface Intermediates, Oxidation Resistance +17

Impact of parasitic reactions on wafer-scale uniformity in water-based and ozone-based atomic layer deposition

Laurent Henn‐Lecordier, M. Anderle, Erin Robertson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 25 citations

Engineering, Atmospheric Photochemistry, Oxidation Resistance +19

Rows per page

1–5 of 13