Maarit Kariniemi

Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films

Maarit Kariniemi, Jaakko Niinistö, Timo Hatanpää et al. · Chemistry of Materials · 2011 · 118 citations

Materials Science, Thin Film Physics, Engineering +12

Novel mixed alkylamido-cyclopentadienyl precursors for ALD of ZrO2 thin films

Jaakko Niinistö, Kaupo Kukli, Maarit Kariniemi et al. · Journal of Materials Chemistry · 2008 · 82 citations

Materials Science, High Permittivity Zirconium, Ii-vi Semiconductor +11

Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study

Maarit Kariniemi, Jaakko Niinistö, Marko Vehkamäki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 63 citations

Materials Science, Chemical Engineering, Remote Peald +15

Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars

Joshua D. Caldwell, O. J. Glembocki, Francisco J. Bezares et al. · Optics Express · 2011 · 53 citations · Full text

Materials Science, Plasmonics, Engineering +12

Hydrogen–argon plasma pre-treatment for improving the anti-corrosion properties of thin Al2O3 films deposited using atomic layer deposition on steel

Emma Härkönen, Stephen E. Potts, W. M. M. Kessels et al. · Thin Solid Films · 2013 · 31 citations

Materials Science, Materials Engineering, Chemical Engineering +11