Concepedia

M. Altebockwinkel

MA

Statistics

Publications

3

Citations

73

H-Index

3

Active since

1987

Affiliations

University of Münster(Current)

M. Altebockwinkel is an author at University of Münster specializing in materials engineering, semiconductor surfaces, and materials science.

Publications per year

1987–1992

3

Publications

3

Depth profile analysis of hydrogenated carbon layers on silicon by x-ray photoelectron spectroscopy, Auger electron spectroscopy, electron energy-loss spectroscopy, and secondary ion mass spectrometry

P. Sander, U. Kaiser, M. Altebockwinkel et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 42 citations

, , +17

Surface and in-depth analysis of hydrogenated carbon layers on silicon and germanium by mass and electron spectroscopy

P. Sander, M. Altebockwinkel, W. Storm et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 21 citations

, , +17

Analysis of passivating oxide and surface contaminants on GaAs (100) by temperature-dependent and angle resolved x-ray photoelectron spectroscopy, and time-of-flight secondary ion mass spectrometry

Florian Schröder, W. Storm, M. Altebockwinkel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 10 citations

, , +17

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