Koichi Kuhara

Reduction of line edge roughness in the top surface imaging process

Shigeyasu Mori, Taku Morisawa, Nobuyuki Matsuzawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 45 citations

Engineering, Microscopy, Top Surface +25

Effect of cations on the electrochemical behavior of p-toluenesulfonate-doped polypyrrole in various aqueous solutions

Masahiro Iseki, Kaori Saito, Mineo Ikematsu et al. · Journal of Electroanalytical Chemistry · 1993 · 41 citations

Materials Science, Conducting Polymer, Chemical Engineering +10

Electrochemical exchange process of dopant anions in polypyrrole

Masahiro Iseki, Kaori Saito, Koichi Kuhara et al. · Synthetic Metals · 1991 · 35 citations

Conducting Polymer, Chemical Engineering, Engineering +4

Prospect and challenges of ArF excimer laser lithography processes and materials

Takeshi Ohfuji, Takuya Ogawa, Koichi Kuhara et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 16 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Dry etching resistance of methacrylate polymers for ArF excimer laser lithography

Takeshi Ohfuji, Masayuki Endo, Makoto Takahashi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 15 citations

Dry-etching Resistance, Engineering, Electron-beam Lithography +16