Statistics
Publications
1
Citations
45
H-Index
1
Active since
1998
Affiliations
Taku Morisawa is an author at Association of Super-Advanced Electronics specializing in 3d imaging, surface modification, and geometric modeling.
Publications per year
1998–1998
1
1
Reduction of line edge roughness in the top surface imaging process
Shigeyasu Mori, Taku Morisawa, Nobuyuki Matsuzawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 45 citations
Engineering, Microscopy, Top Surface +25
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