W. Engl

Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications

Ivo W. Rangelow, Tzv. Ivanov, K. Ivanova et al. · Microelectronic Engineering · 2007 · 49 citations

Engineering, Materials Science, Mechanical Engineering +14

Scanning proximal probes for parallel imaging and lithography

K. Ivanova, Y. Sarov, Tzv. Ivanov et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 49 citations

Engineering, Electrical Engineering, Actuators +8

Modeling of low-pressure deposition of SiO₂by decomposition of TEOS

Hans‐Jürgen Huppertz, W. Engl · IEEE Transactions on Electron Devices · 1979 · 47 citations

Engineering, Materials Engineering, Materials Science +16

Comparing AFM cantilever stiffness measured using the thermal vibration and the improved thermal vibration methods with that of an SI traceable method based on MEMS

Uwe Brand, Sai Gao, W. Engl et al. · Measurement Science and Technology · 2017 · 21 citations

Engineering, Mechanical Engineering, Biomechanics +12