Michael B. McIlrath

Statistics

Publications

Citations

102

H-Index

Active since

1992

Affiliations

Massachusetts Institute of Technology(Current)

Michael B. McIlrath is an author at Massachusetts Institute of Technology specializing in engineering, electrical engineering, and process engineering.

Publications per year

1992–2002

Publications

Two-dimensional doping profile characterization of MOSFETs by inverse modeling using I-V characteristics in the subthreshold region

Z.K. Lee, Michael B. McIlrath, D.A. Antoniadis · IEEE Transactions on Electron Devices · 1999 · 45 citations

Engineering, Electrical Engineering, Materials Science +17

A general semiconductor press modeling framework

Duane S. Boning, Michael B. McIlrath, P. Penfield et al. · IEEE Transactions on Semiconductor Manufacturing · 1992 · 29 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Inverse modeling of MOSFETs using I-V characteristics in the subthreshold region

Z.K. Lee, Michael B. McIlrath, D.A. Antoniadis · 2002 · 15 citations

Engineering, Electrical Engineering, Materials Science +15

Integrating semiconductor process design and manufacture using a unified process flow representation

Michael B. McIlrath, Duane S. Boning · 2002 · 13 citations

Engineering, Industrial Engineering, Manufacturing Engineering +17

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