Concepedia
Statistics
Publications
5
Citations
117
H-Index
Active since
2002
Affiliations
Hitachi (Japan)(Current)
Association of Super-Advanced Electronics
Kazuyuki Hozawa is an author at Hitachi (Japan) specializing in materials science, electronic materials, and engineering.
Publications per year
2002–2013
Fabricating 3D integrated CMOS devices by using wafer stacking and via-last TSV technologies
Mayu Aoki, F. Furuta, Kazuyuki Hozawa et al. · 2013 · 31 citations
Engineering, Electrical Engineering, Materials Science +17
Copper Diffusion Behavior in SiO<sub>2</sub>/Si Structure During 400°C Annealing
Kazuyuki Hozawa, J. Yugami · Japanese Journal of Applied Physics · 2004 · 28 citations
Engineering, Materials Engineering, Materials Science +17
Wafer-level hybrid bonding technology with copper/polymer co-planarization
Mayu Aoki, Kazuyuki Hozawa, Ken-ichi Takeda · 2010 · 26 citations
Intrinsic Gettering of Copper in Silicon Wafers
Seiichi Isomae, Hidetsugu Ishida, Toshihiko Itoga et al. · Journal of The Electrochemical Society · 2002 · 18 citations
Natural Sciences, Materials Engineering, Materials Science +14
True influence of wafer-backside copper contamination during the back-end process on device characteristics
Kazuyuki Hozawa, Hisashi Miyazaki, J. Yugami · 2003 · 14 citations
1–5 of 5