Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF₄

Steven Brandt, Birk Berger, E Schüngel, +11

Plasma Sources Science and Technology

Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms

James B. Franek, Steven Brandt, Birk Berger, +4

Review of Scientific Instruments

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H₂and CF₄

Benoit G. Bruneau, Trevor Lafleur, Timo Gans, +13

Plasma Sources Science and Technology

Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

E Schüngel, Steven Brandt, Zoltán Donkó, +3

Plasma Sources Science and Technology

Plasma WavesElectrical EngineeringPlasma ElectronicsEngineeringPhysics +12

Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF₄

Steven Brandt, Birk Berger, Zoltán Donkó, +4

Plasma Sources Science and Technology

EngineeringPhysicsParticle DynamicsPlasma SimulationApplied Plasma Physic +3

On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges

E Schüngel, Steven Brandt, Ihor Korolov, +3

Physics of Plasmas

Multi-frequency Capacitive DischargesElectrical EngineeringEngineeringPhysicsGlow Discharge +8

Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms

Birk Berger, Steven Brandt, James B. Franek, +4

Journal of Applied Physics

EngineeringRadio FrequencyGlow DischargeLaser Plasma PhysicPlasma Science +21

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bastien Bruneau, Ihor Korolov, Trevor Lafleur, +10

Journal of Applied Physics

Electrical EngineeringEngineeringAmplitude AsymmetryPhysicsNonthermal Plasma +11

Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

Zoltán Donkó, Aranka Derzsi, Ihor Korolov, +12

Plasma Physics and Controlled Fusion

Electron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

Edmund Schuengel, Steven Brandt, Zoltán Donkó, +3

arXiv (Cornell University)

Electrical EngineeringEngineeringPhysicsApplied PhysicsApplied Plasma Physic +7