Concepedia

Publication | Open Access

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H<sub>2</sub>and CF<sub>4</sub>

DOIFull Paper Access

50

Citations

34

References

2015

Year

Benoit G. Bruneau, Trevor Lafleur, Timo Gans, Deborah O’Connell, Arthur Greb, Ihor Korolov, Aranka Derzsi, Zoltán Donkó, Steven Brandt, E Schüngel,
Plasma Sources Science and Technology

Abstract

Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: excitation dynamics and ion flux asymmetry

References

YearCitations

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