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Publication | Open Access

Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF<sub>4</sub>

DOIFull Paper Access

82

Citations

97

References

2016

Year

Steven Brandt, Birk Berger, E Schüngel, Ihor Korolov, Aranka Derzsi, Benoit G. Bruneau, Erik V. Johnson, Trevor Lafleur, Deborah O’Connell, M. E. Koepke,
Plasma Sources Science and Technology

Abstract

International audience

References

YearCitations

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