Birk Berger

Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF₄

Steven Brandt, Birk Berger, E Schüngel et al. · Plasma Sources Science and Technology · 2016 · 84 citations · Full text

Natural Sciences, Physics, Atmospheric Electricity +14

Material dependent modeling of secondary electron emission coefficients and its effects on PIC/MCC simulation results of capacitive RF plasmas

Manaswi Daksha, Aranka Derzsi, David Schulenberg et al. · Plasma Sources Science and Technology · 2019 · 63 citations

Natural Sciences, Electrical Engineering, Materials Science +12

Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms

James B. Franek, Steven Brandt, Birk Berger et al. · Review of Scientific Instruments · 2015 · 57 citations

Natural Sciences, Electrical Engineering, Physics +13

Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

Péter Hartmann, Li Wang, K Nösges et al. · Plasma Sources Science and Technology · 2020 · 51 citations

Natural Sciences, Electrical Engineering, Physics +14

Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features

Péter Hartmann, Li Wang, K Nösges et al. · Journal of Physics D Applied Physics · 2021 · 39 citations · Full text

Natural Sciences, Electrical Engineering, Physics +17