Concepedia

K Nösges

KN

Statistics

Publications

2

Citations

90

H-Index

2

Active since

2020

Affiliations

HUN-REN Wigner Research Centre for Physics(Current)

Baylor University

Institute for Solid State Physics and Optics

Dalian University of Technology

University of Pannonia

K Nösges is an author at HUN-REN Wigner Research Centre for Physics specializing in plasma-surface interactions, electrical engineering, and physics.

Publications per year

2020–2021

2

Publications

2

Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages

Péter Hartmann, Li Wang, K Nösges et al. · Plasma Sources Science and Technology · 2020 · 51 citations

, , +14

Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features

Péter Hartmann, Li Wang, K Nösges et al. · Journal of Physics D Applied Physics · 2021 · 39 citations · Full text

, , +17

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