Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF<sub>4</sub> - Concepedia

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Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF<sub>4</sub>

31

Citations

111

References

2019

Year

Steven Brandt, Birk Berger, Zoltán Donkó, Aranka Derzsi, E Schüngel, M. E. Koepke, Julian Schulze

Plasma Sources Science and Technology

EngineeringPhysicsParticle DynamicsPlasma SimulationApplied Plasma PhysicPlasma SciencePlasma PhysicsTailored Voltage Waveforms

References

	Year	Citations

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