Hajime Nii

Up-conversion fluorescence of Er3+ — and Yb3+-doped TeO2-based oxide glass and single crystals

Hajime Nii, Kenichi Ozaki, Markus Herren et al. · Journal of Luminescence · 1998 · 39 citations

Materials Science, Single Crystals, Engineering +6

Photoinduced outgassing from the resist for extreme ultraviolet lithography by the analysis of mass spectroscopy

Takeo Watanabe, Hiroo Kinoshita, Hajime Nii et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 37 citations

Vacuum Environment, Chemical Engineering, Mass Spectroscopy +15

Fabrication of Mo/Al multilayer films for a wavelength of 18.5 nm

Hajime Nii, Masahito Niibe, H. Kinoshita et al. · Journal of Synchrotron Radiation · 1998 · 19 citations · Full text

Materials Science, Materials Engineering, Surface Characterization +15

Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering

Hajime Nii, Makoto Miyagawa, Y. Matsuo et al. · Japanese Journal of Applied Physics · 2002 · 17 citations

Thin Film Physics, Optical Materials, Engineering +20

Development of the large field extreme ultraviolet lithography camera

Takeo Watanabe, Hiroo Kinoshita, Hajime Nii et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 13 citations

Peak Reflectivity, Optical Materials, Engineering +20