Dorothe Oorschot

Experimental approach to EUV imaging enhancement by mask absorber height optimization

Natalia Davydova, Robert de Kruif, Haiko Rolff et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +16

Mask aspects of EUVL imaging at 27nm node and below

Natalia Davydova, Eelco van Setten, Sang-In Han et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 16 citations

Engineering, Materials Engineering, Materials Science +12

Impact of an etched EUV mask black border on imaging: part II

Natalia Davydova, Robert de Kruif, Hiroaki Morimoto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +9

EUV mask stack optimization for enhanced imaging performance

Eelco van Setten, Dorothe Oorschot, Cheuk-Wah Man et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +16

Imaging performance improvements by EUV mask stack optimization

Natalia Davydova, Eelco van Setten, Robert de Kruif et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +12