Statistics
Publications
5
Citations
176
H-Index
5
Active since
1999
Affiliations
Ray S. Uttaro is an author at MIT Lincoln Laboratory specializing in natural sciences, materials science, and materials engineering.
Publications per year
1999–2005
5
5
Materials issues for optical components and photomasks in 157 nm lithography
Vladimir Liberman, T. M. Bloomstein, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 54 citations
Natural Sciences, Materials Engineering, Materials Science +16
157 nm: Deepest deep-ultraviolet yet
M. Rothschild, T. M. Bloomstein, Jane E. Curtin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 48 citations
Natural Sciences, Manufacturing Engineering, Materials Science +11
Diamond Field-emission Cathodes
M. W. Geis, J.C. Twichell, C. O. Bozler et al. · 2005 · 12 citations
Natural Sciences, Materials Engineering, Materials Science +14
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