Concepedia

Steven C. Shatas

SC

Statistics

Publications

11

Citations

486

H-Index

10

Active since

1984

Affiliations

Stanford University(Current)

Sandia National Laboratories

Alpha and Omega Semiconductor (United States)

Steven C. Shatas is an author at Stanford University specializing in materials engineering, materials science, and silicon materials.

Publications per year

1984–1992

11

Publications

11

Rapid thermal nitridation of SiO2 for nitroxide thin dielectrics

Mehrdad M. Moslehi, Krishna C. Saraswat, Steven C. Shatas · Applied Physics Letters · 1985 · 87 citations

, , +17

Transient enhanced diffusion in arsenic-implanted short time annealed silicon

R. Kalish, T. O. Sedgwick, Sebastian Mäder et al. · Applied Physics Letters · 1984 · 70 citations

, , +16

Thin SiO2 insulators grown by rapid thermal oxidation of silicon

Mehrdad M. Moslehi, Steven C. Shatas, Krishna C. Saraswat · Applied Physics Letters · 1985 · 70 citations

, , +17

Rapid thermal annealing and regrowth of thermal donors in silicon

S. K. Hahn, Steven C. Shatas · Journal of Applied Physics · 1986 · 63 citations

, , +15

Compositional Studies of Thermally Nitrided Silicon Dioxide (Nitroxide)

Masoud Moslehi, C. J. Han, Krishna C. Saraswat et al. · Journal of The Electrochemical Society · 1985 · 58 citations

, , +17

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