Statistics
Publications
5
Citations
219
H-Index
5
Active since
1989
Affiliations
NEC (Japan)(Current)
K. Komachi is an author at NEC (Japan) specializing in plasma physics, physics, and natural sciences.
Publications per year
1989–1994
5
5
Oxide Etching Using Surface Wave Coupled Plasma
Takeshi Akimoto, Eiji Ikawa, Toshiaki Sango et al. · Japanese Journal of Applied Physics · 1994 · 19 citations
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