Concepedia

Holger Moritz

HM

Statistics

Publications

4

Citations

94

H-Index

4

Active since

1979

Affiliations

IBM (United States)(Current)

Klinikum Sindelfingen-Böblingen

Holger Moritz is an author at IBM (United States) specializing in semiconductor devices, engineering, and electrical engineering.

Publications per year

1979–1994

4

Publications

4

Optical single layer lift-off process

Holger Moritz · IEEE Transactions on Electron Devices · 1985 · 43 citations

Engineering, Electrical Engineering, Materials Science +12

High-resolution lithography with projection printing

Holger Moritz · IEEE Transactions on Electron Devices · 1979 · 20 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Contrast transfer function measurements of deep ultraviolet steppers

Andreas Grassmann, Holger Moritz · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 17 citations

Natural Sciences, Physics, Contrast Sensitivity +14

The Lithographic Performance and Contamination Resistance of a New Family of Chemically Amplified DUV Photoresists.

Greg Breyta, Donald C. Hofer, Hiroshi Itô et al. · Journal of Photopolymer Science and Technology · 1994 · 14 citations · Full text

Engineering, Electrical Engineering, Materials Science +13

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