Concepedia

Dennis S. Grimard

DS

3

Publications

65

Citations

3

H-Index

1998

Active since

Affiliations

University of Michigan(Current)

Dennis S. Grimard is an author at University of Michigan specializing in engineering, applied physics, and physics.

Top concepts

Publications per year

1998–2013

3

Publications

3

Feedforward control for reduced run-to-run variation in microelectronics manufacturing

Steve Ruegsegger, Aaron B. Wagner, J.S. Freudenberg et al. · IEEE Transactions on Semiconductor Manufacturing · 1999 · 27 citations

, , +14

Control of Ion Energy in a Capacitively Coupled Reactive Ion Etcher

H. M. Park, Craig Garvin, Dennis S. Grimard et al. · Journal of The Electrochemical Society · 1998 · 22 citations

, , +17

Drie of fused silica

Zongliang Cao, B. VanDerElzen, Kevin J. Owen et al. · 2013 · 16 citations

, , +10

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