B. VanDerElzen is an author at University of Michigan specializing in engineering, microfabrication, and applied physics.
Top concepts
EngineeringApplied PhysicsMicrofabricationSurface ScienceMaterial ScienceMicroelectronicsElectronic PackagingElectrical EngineeringPhysicsThin Films
Publications per year
2002–2013
3
3
High aspect ratio deep silicon etching
Kevin J. Owen, B. VanDerElzen, Rebecca L. Peterson et al. · 2012 · 51 citations
Reduced Undercut, Electrical Engineering, Wafer Scale Processing +13
Zongliang Cao, B. VanDerElzen, Kevin J. Owen et al. · 2013 · 16 citations
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