IEEE Transactions on Nuclear Science · 2002 · 65 citations · 12 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor DevicesSemiconductor MaterialsThin FilmsNeutron DetectionSemiconductor DetectorsSemiconductor SurfacesSemiconductor Thin FilmsThin Film AdhesionThin Film Surface MorphologyDetector FabricationFilm AdhesionNeutron Detector SystemsNeutron DetectorsSemiconductor Neutron DetectorsSemiconductor Radiation DetectorsThermal Neutron DetectionThin-film Detectors
Experimental devices using patterns of holes etched into semiconductor surfaces are under evaluation for use as neutron detectors. The devices have miniature holes equidistantly spaced so as to completely cover the front surface of a planar semiconductor device. The devices have both electrical contacts and neutron-reactive coatings applied over the surface and within the holes. The tiny holes assist in thin-film adhesion while offering a method to increase the thermal-neutron detection efficiency.
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Radiation detection and measurement
M.C. Scott · Annals of Nuclear Energy · 1980 · 1.2K citations
Introduction to microelectronic fabrication
G.W.A.D. · Microelectronics Reliability · 1988 · 232 citations