Publication | Closed Access
New surface morphology for low stress thin-film-coated thermal neutron detectors
65
Citations
12
References
2002
Year
EngineeringMiniature HolesNanoelectronicsTiny HolesNew Surface MorphologyPlanar Semiconductor DeviceElectronic PackagingThin Film ProcessingMaterials ScienceElectrical EngineeringRadiation DetectionPhysicsNeutron SourceMicroelectronicsMicrofabricationSurface ScienceApplied PhysicsDetector PhysicThin FilmsNeutron Scattering
Experimental devices using patterns of holes etched into semiconductor surfaces are under evaluation for use as neutron detectors. The devices have miniature holes equidistantly spaced so as to completely cover the front surface of a planar semiconductor device. The devices have both electrical contacts and neutron-reactive coatings applied over the surface and within the holes. The tiny holes assist in thin-film adhesion while offering a method to increase the thermal-neutron detection efficiency.
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