Alexey Y. Kovalgin

CO interaction with the surface of thermally activated CaO and MgO

M. A. Babaeva, D. S. Bystrov, Alexey Y. Kovalgin · Journal of Catalysis · 1990 · 107 citations

Materials Science, Materials Engineering, Chemical Engineering +9

Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range

N. Stavitski, M.J.H. van Dal, A. Lauwers et al. · IEEE Electron Device Letters · 2008 · 97 citations

Engineering, Integrated Circuits, Silicon On Insulator +17

From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO₂ Nanopowder

Fabio Grillo, Hao Van Bui, Damiano La Zara et al. · Small · 2018 · 69 citations · Full text

Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry

Hao Van Bui, A.W. Groenland, Antonius A. I. Aarnink et al. · Journal of The Electrochemical Society · 2011 · 66 citations

Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films

Hao Van Bui, F. B. Wiggers, Anubha A. Gupta et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 61 citations · Full text

Materials Science, Aluminium Nitride, Optical Materials +12