William R. Livesay

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Active since

1978

Affiliations

Cypress Semiconductor Corporation (United States)(Current)

William R. Livesay is an author at Cypress Semiconductor Corporation (United States) specializing in engineering, materials science, and materials engineering.

Publications per year

1978–2006

Publications

193-nm CD shrinkage under SEM: modeling the mechanism

Andrew Habermas, Dongsung Hong, Matthew F. Ross et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 28 citations

Engineering, Materials Engineering, Materials Science +15

61.5: LED‐Based Light‐Recycling Light Sources for Projection Displays

Karl W. Beeson, Scott Zimmerman, William R. Livesay et al. · SID Symposium Digest of Technical Papers · 2006 · 17 citations

Engineering, Electrical Engineering, Optics +9

Mechanism studies of scanning electron microscope measurement effects on 193-nm photoresists and the development of improved line-width measurement methods

T. R. Sarrubi, Matthew F. Ross, Mark Neisser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +13

Imaging and alignment tests on an electron projection system

William R. Livesay · Journal of Vacuum Science and Technology · 1978 · 10 citations · Full text

Engineering, Electrical Engineering, Microelectronics +14

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